Historical shareholding details of Grantham, Mayo, Van Otterloo & Co., LLC holdings in Axcelis Technologies Inc (ACLS)

Monthly changes of Grantham, Mayo, Van Otterloo & Co., LLC shareholding in Axcelis Technologies Inc over the previous months

Month	Name	Total no. shares held	Percent Holding
Month	Name	Total no. shares held	Percent Holding
Mar 31, 2025	Grantham, Mayo, Van Otterloo & Co., Llc	579,387	1.80%

Dec 31, 2024	Grantham, Mayo, Van Otterloo & Co., Llc	764,069	2.38%

Sep 30, 2024	Grantham, Mayo, Van Otterloo & Co., Llc	495,971	1.53%

Jun 30, 2024	Grantham, Mayo, Van Otterloo & Co., Llc	280,984	0.86%

Mar 31, 2024	Grantham, Mayo, Van Otterloo & Co., Llc	275,406	0.84%

Dec 31, 2023	Grantham, Mayo, Van Otterloo & Co., Llc	142,991	0.44%

Sep 30, 2023	Grantham, Mayo, Van Otterloo & Co., Llc	119,829	0.37%

Jun 30, 2023	Grantham, Mayo, Van Otterloo & Co., Llc	130,506	0.40%

Mar 31, 2023	Grantham, Mayo, Van Otterloo & Co., Llc	136,300	0.42%

Dec 31, 2022	Grantham, Mayo, Van Otterloo & Co., Llc	97,084	0.30%